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ArticleJ-GLOBAL ID:200902015486263945整理番号:84A0285978

特集:転換期の中の超LSIプロセス装置 縮小投影露光装置ULTRASTEP1000

著者:余田茂(立石電機半導体製造装置事業部)、小出正信(立石電機半導体製造装置事業部)
資料名:電子材料 巻:23 号:3 ページ:32-36
発行年:1984年03月
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.