About J-GLOBAL

日本語

Font size
  • A
  • A

Articleの詳細情報

ArticleJ-GLOBAL ID:200902015492769427整理番号:90A0292095

Registration accuracy in focused-ion-beam lithography for the fabrication of a GaAs FET with a mushroom gate.

きのこ形ゲートをもつGaAs‐FET製作のためのフォーカストイオンビームリソグラフィーにおけるレジストレーション精度

著者:YASUOKA A(Mitsubishi Electric Corp., Itami, JPN)、HOSONO K(Mitsubishi Electric Corp., Itami, JPN)、MORIMOTO H(Mitsubishi Electric Corp., Itami, JPN)・・・
資料名:J Electrochem Soc 巻:136 号:10 ページ:3030-3033
発行年:1989年10月
  • J-GLOBAL home
  • Bookmark J-GLOBAL

J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.