Art
J-GLOBAL ID：200902015498060128   Reference number：86A0428590

Laser wet etching of diffraction gratings in GaAs for integrated optics.

光集積素子のためのGaAsにおける回折格子のレーザウェットエッチング
Author (1)：
MATZ R

About MATZ R

(Siemens AG, FRG)

About Siemens AG, FRG


Material：
Journal of Lightwave Technology  (J Lightwave Technol)

About Journal of Lightwave Technology


Volume： 4  Issue： 7  Page： 726-729  Publication year： Jul. 1986 
JST Material Number： H0922A  ISSN： 0733-8724  CODEN： JLTEDG  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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integrated optics

About integrated optics

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Optical integrated circuits,integrated optics 
(BD06050D)

About Optical integrated circuits,integrated optics

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
光集積

About 光集積

, 
GaAs

About GaAs

, 
回折格子

About 回折格子

, 
レーザ

About レーザ

, 
ウェットエッチング

About ウェットエッチング


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