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ArticleJ-GLOBAL ID:200902015501991286整理番号:86A0253149

超精密測定技術の動向と展開 測定技術に何が要求されているか

Trends and development of super-precision measurement technology. What are required of measuring technology?

著者:河野つぐ男(金沢大工)
資料名:機械と工具 巻:30 号:4 ページ:39-44
発行年:1986年04月
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