Art
J-GLOBAL ID：200902015503618442
Reference number：86A0328958
Measurement of edge-intersecting features in SEM images.
走査電子顕微鏡(SEM)像におけるエッジ交さ特性の測定
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Author (2)：
,
Material：
Volume：
20th
Page：
133-136
Publication year：
1985
JST Material Number：
E0776B
ISSN：
0278-1727
Document type：
Proceedings
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Electron and ion microscopes
Terms in the title (5)：
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