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J-GLOBAL ID:200902015503619333   Reference number:86A0337326

Study on CVD mechanism. Reaction of Si(OMe)4 with outer surface of zeolite caused by difference of evaporation temperature.

CVD機構の研究 蒸着温度のちがいによるSi(OMe)4とゼオライト外表面との反応
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Volume: 56th  Page: 46-47  Publication year: Sep. 17, 1985 
JST Material Number: S0874A  ISSN: 1343-9936  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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