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ArticleJ-GLOBAL ID:200902015503732300整理番号:83A0144300

Optical properties of reactively sputtered Ta2O5 films.

反応性スパッタリングTa2O5薄膜の光学的性質

著者:RUBIO F(Escuela de Ingenieros Industriales, Spain)、ALBELLA J M(CSIC, Madrid)、DENIS J(CSIC, Madrid)・・・
資料名:J Vac Sci Technol 巻:21 号:4 ページ:1043-1045
発行年:1982年11月
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