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ArticleJ-GLOBAL ID:200902015510960857整理番号:92A0000498

Cathodoluminescence from diamond films grown by plasma-enhanced chemical vapor deposition in dilute CO/H2, CF4/H2, and CH4/H2 mixtures.

希薄CO/H2,CF4/H2,CH4/H2混合でのプラズマ増強化学蒸着で成長させたダイアモンド膜からの陰極線ルミネセンス

著者:GRAHAM R J(Arizona State Univ., Arizona)、POSTHILL J B(Research Triangle Inst., North Carolina)、RUDDER R A(Research Triangle Inst., North Carolina)・・・
資料名:Appl Phys Lett 巻:59 号:19 ページ:2463-2465
発行年:1991年11月04日
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