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ArticleJ-GLOBAL ID:200902015511191776整理番号:92A0110500

CVDダイヤモンド表面に関する研究

Studies of CVD diamond surfaces.

著者:栄森信広(大阪大 工)、森勇介(大阪大 工)、伊藤利道(大阪大 工)・・・
資料名:応用物理学会学術講演会講演予稿集 巻:52nd 号:2 ページ:476
発行年:1991年10月
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