Art
J-GLOBAL ID：200902015512335399   Reference number：86A0507622

Electromigration lifetime enhancement in multi-level metallization.

多層メタル化における耐エレクトロマイグレーション寿命の改善
Material：
IBM Technical Disclosure Bulletin  (IBM Tech Disclosure Bull)

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Volume： 28  Issue： 6  Page： 2667-2668  Publication year： Nov. 1985 
JST Material Number： E0292B  ISSN： 0018-8689  CODEN： IBMTA  Document type： Article
Article type： 解説  Country of issue： United States (USA)  Language： ENGLISH (EN)
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metallization(IC)

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,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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migration

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JST classification (1)：
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Manufacturing technology of solid-state devices 
(NC03030V)

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Terms in the title (4)：
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多層

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, 
メタル化

About メタル化

, 
エレクトロマイグレーション

About エレクトロマイグレーション

, 
寿命

About 寿命


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