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J-GLOBAL ID:200902015520561390   Reference number:91A0052034

Polarized light scattering by silicon oxide thin film edge on silicon: an experimental approach for thin film thickness determination.

シリコン上の酸化シリコン薄膜のエッジによる偏光散乱 薄膜厚さ測定のための実験法
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Material:
Volume:Issue: 11  Page: 1237-1243  Publication year: Nov. 1990 
JST Material Number: C0354C  ISSN: 0957-0233  CODEN: MSTCEP  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Polarimetry and polarimeters  ,  Measuring methods and instruments of length,area,cross section,volume,angle 

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