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J-GLOBAL ID：200902015534041402 Reference number：91A0151131
Computer aided engineering for microsystems-status and trends.
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Author (1)：
MAERZ R
About MAERZ R
Search "200901100336665208"
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(
Siemens AG, Muenchen, DEU
)
About Siemens AG, Muenchen, DEU
Search "201551000080979246"
Search "Siemens AG, Muenchen, DEU"
Material：
Micro System Technologies 90 (Micro Syst Technol 90)
About Micro System Technologies 90
Search "K19901062"
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Detailed information
Page：
31-37
Publication year：
1990
JST Material Number：
K19901062
ISBN：
3-540-53025-8
Document type：
Proceedings
Country of issue：
Germany, Federal Republic of (DEU)
Language：
ENGLISH (EN)
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