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J-GLOBAL ID:200902015536740650   Reference number:84A0195596

Role of ions in ion engineering: New approach to studying the ion-assisted technique.

イオン工学におけるイオンの役割 イオン助成技術研究の新しいアプローチ
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Page: 785-798  Publication year: 1983 
JST Material Number: K19840044  Document type: Proceedings
Article type: 解説  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Applications of electron beams and ion beams  ,  Thin films in general 
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