Art
J-GLOBAL ID:200902015536740650
Reference number:84A0195596
Role of ions in ion engineering: New approach to studying the ion-assisted technique.
イオン工学におけるイオンの役割 イオン助成技術研究の新しいアプローチ
Author (1):
Material:
Page:
785-798
Publication year:
1983
JST Material Number:
K19840044
Document type:
Proceedings
Article type:
解説
Country of issue:
Japan (JPN)
Language:
ENGLISH (EN)
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Thesaurus term/Semi thesaurus term
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JST classification (2):
JST classification
Category name(code) classified by JST.
Applications of electron beams and ion beams
, Thin films in general
Terms in the title (5):
Terms in the title
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