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ArticleJ-GLOBAL ID:200902015538136149整理番号:91A0033861

Feイオン注入によってGaAsに形成される欠陥のDLTS

DLTS of defects created in GaAs by Fe-ion implantation.

著者:谷脇雅文(北大 工)、小出秀人(北大 工)、吉田博行(京大 原子炉実験所)・・・
資料名:応用物理学会学術講演会講演予稿集 巻:51st 号:3 ページ:1124
発行年:1990年09月
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