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ArticleJ-GLOBAL ID:200902015543221170整理番号:91A0719006

Study of the changes in the silicide surface composition under argon ion bombardment.

著者:ZAPOROZCHENKO V I(All‐Union Research Center for Surface and Vacuum Investigation(VNICPV), Moscow, SUN)、VOJTUSIK S S(All‐Union Research Center for Surface and Vacuum Investigation(VNICPV), Moscow, SUN)、STEPANOVA M G(All‐Union Research Center for Surface and Vacuum Investigation(VNICPV), Moscow, SUN)・・・
資料名:Surf Sci 巻:251/252 ページ:159-164
発行年:1991年07月
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