Art
J-GLOBAL ID:200902015545404981
Reference number:84A0355453
Direct high-resolution excimer laser photoetching.
直接高分解能エキシマレーザフォトエッチング
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Author (2):
,
Material:
Volume:
33
Issue:
3
Page:
195-198
Publication year:
Mar. 1984
JST Material Number:
D0256C
ISSN:
0947-8396
CODEN:
APHYCC
Document type:
Article
Article type:
短報
Country of issue:
Germany, Federal Republic of (DEU)
Language:
ENGLISH (EN)
Thesaurus term:
Thesaurus term/Semi thesaurus term
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JST classification (2):
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
, Laser irradiation effects and damages
Terms in the title (3):
Terms in the title
Keywords automatically extracted from the title.
,
,
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