Art
J-GLOBAL ID：200902015546798568
Reference number：90A0442621
Scanning electron microscope-based metrological electron microscope system and new prototype scanning electron microscope magnification standard.
走査電子顕微鏡に基づいた度量衡学的電子顕微鏡システムと新試作走査電子顕微鏡倍率標準
Author (1)：
Material：
Volume：
3
Issue：
4
Page：
1087-1099
Publication year：
Dec. 1989
JST Material Number：
A0512C
ISSN：
0891-7035
CODEN：
SCMIEU
Document type：
Proceedings
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Electron and ion microscopes
Terms in the title (6)：
Terms in the title
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