Art
J-GLOBAL ID:200902015548680351
Reference number:87A0314563
Incoherent light annealing of Si-implanted GaAs.
Siを注入したGaAsのインコヒーレント光焼なまし
Author (3):
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Material:
Issue:
5 別冊
Page:
129-134
Publication year:
Mar. 1986
JST Material Number:
S0830B
ISSN:
0286-0201
Document type:
Article
Article type:
原著論文
Country of issue:
Japan (JPN)
Language:
ENGLISH (EN)
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JST classification (1):
JST classification
Category name(code) classified by JST.
Irradiational changes semiconductors
Terms in the title (4):
Terms in the title
Keywords automatically extracted from the title.
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