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ArticleJ-GLOBAL ID:200902015551272680整理番号:87A0185189

Thermal and structural stability of cosputtered amorphous TaxCu1-x alloy thin films on GaAs.

GaAs上に同時スパッタした非晶質TaxCu1-x合金薄膜の熱的および構造的安定性

著者:OH J E(Univ. Nebraska, NB, USA)、WOOLLAM J A(Univ. Nebraska, NB, USA)、AYLESWORTH K D(Univ. Nebraska, NB, USA)・・・
資料名:J Appl Phys 巻:60 号:12 ページ:4281-4286
発行年:1986年12月15日
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