Art
J-GLOBAL ID：200902015553880253
Reference number：88A0296447
3D-ICs: Entwicklungstrends.
3次元IC その開発の進展状況
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Author (1)：
Material：
Volume：
37
Issue：
5
Page：
83-86
Publication year：
Mar. 04, 1988
JST Material Number：
C0404A
ISSN：
0013-5658
CODEN：
EKRKA
Document type：
Article
Article type：
解説
Country of issue：
Germany, Federal Republic of (DEU)
Language：
GERMAN (DE)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
Terms in the title (5)：
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