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J-GLOBAL ID:200902015562622526   Reference number:86A0396408

An update on the integration of silicon pressure sensors.

集積けい素圧力センサの最近の状況
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Material:
Volume: 29  Page: 27.4.1-27.4.5  Publication year: 1985 
JST Material Number: B0197A  Document type: Proceedings
Article type: 解説  Country of issue: United States (USA)  Language: ENGLISH (EN)
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JST classification
Category name(code) classified by JST.
Measuring methods and instruments of force,work load,pressure,friction 
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