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J-GLOBAL ID:200902015563572948   Reference number:90A0070753

Зондовая установка для измерения емкостных характеристик МИС.

モノリシックICの容量特性の探針測定装置
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Material:
Volume: 32  Issue:Page: 87-88  Publication year: Sep. 1989 
JST Material Number: R0151A  ISSN: 0021-3470  Document type: Article
Article type: 短報  Country of issue: Russian Federation (RUS)  Language: RUSSIAN (RU)
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Measurement,testing and reliability of solid-state devices  ,  Measuring methods and instruments of R,L,C,Q, and dielectric constant 
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