Art
J-GLOBAL ID：200902015566798432
Reference number：85A0132624
Закономерности роста слоев двуокиси кремния при окислении моносилана закисью азота.
亜酸化窒素によるモノシランの酸化における二酸化けい素層成長の規則性
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Author (2)：
,
Material：
Volume：
25
Issue：
5
Page：
1064-1068
Publication year：
Sep. 1984
JST Material Number：
R0051B
ISSN：
0453-8811
CODEN：
KNKTA
Document type：
Article
Article type：
原著論文
Country of issue：
Russian Federation (RUS)
Language：
RUSSIAN (RU)
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Thesaurus term/Semi thesaurus term
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Catalytic reactions(heterogeneous system)
Terms in the title (6)：
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