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ArticleJ-GLOBAL ID:200902015568515195整理番号:88A0512185

Contact resistance results on CVD blanket tungsten plugs.

化学蒸着全面処理タングステンプラグの接触抵抗結果

著者:SMITH G C(Texas Instruments, Inc., TX, USA)
資料名:Tungsten Other Refract Met VLSI Appl ページ:323-328
発行年:1986年
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