Art
J-GLOBAL ID:200902015569414570
Reference number:92A0662546
Special issue : Formation of natural oxidation films and their processing.Technique for preventing the formation of natural oxidation films.
特集 自然酸化膜の生成とその処理 自然酸化膜生成防止技術
Author (1):
Material:
Volume:
11
Issue:
11
Page:
102-107
Publication year:
Sep. 1992
JST Material Number:
Y0509A
ISSN:
0286-5025
Document type:
Article
Article type:
解説
Country of issue:
Japan (JPN)
Language:
JAPANESE (JA)
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JST classification (1):
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
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