Art
J-GLOBAL ID:200902015569834871   Reference number:89A0193901

An MeV-ion implanter for large area applications.

大面積用MeVイオン注入器の応用
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Volume: 36  Issue:Page: 345-349  Publication year: Mar. 1989 
JST Material Number: H0899A  ISSN: 0168-583X  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Radiation sources,irradiation equipment 
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