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ArticleJ-GLOBAL ID:200902015575987337整理番号:87A0246150

チタン熱拡散によるスラブ形光導波路の最適拡散条件の検討

Investigation of optimum conditions of Ti thermal diffussion in 128.DEG. rotated Y-cut LiNbO3 for slab type optical waveguides.

著者:宮城幸一郎(アンリツ 第1研)、大谷昭仁(アンリツ 第1研)
資料名:アンリツテクニカル 号:53 ページ:59-66
発行年:1987年03月
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