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ArticleJ-GLOBAL ID:200902015582949297整理番号:92A0424499

Morphology and phase stability of TiSi2 on Si.

Si上のTiSi2の形態と相安定性

著者:JEON H(North Carolina State Univ., North Carolina)、SUKOW C A(North Carolina State Univ., North Carolina)、HONEYCUTT J W(North Carolina State Univ., North Carolina)・・・
資料名:J Appl Phys 巻:71 号:9 ページ:4269-4276
発行年:1992年05月01日
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