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ArticleJ-GLOBAL ID:200902015590129606整理番号:90A0312912

Deposition and mixing of multilayer structures with the ion plasma beam.

イオンプラズマビームによる多層構造の蒸着と混合

著者:AKSENOV A O、PANKOVETS N G、POGREBNYAK A D・・・
資料名:Phys Chem Mater Treat 巻:23 号:4 ページ:287-290
発行年:1989年
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