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ArticleJ-GLOBAL ID:200902015590816921整理番号:92A0387420

Selective molecular-beam epitaxy for integrated npn/pnp heterojunction bipolar transistor applications.

集積npn/pnpヘテロ接合バイポーラトランジスタ用の選択分子線エピタクシー

著者:STREIT D C(TRW Electronics and Technology Division, California)、UMEMOTO D K(TRW Electronics and Technology Division, California)、VELEBIR J R(TRW Electronics and Technology Division, California)・・・
資料名:Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures 巻:10 号:2 ページ:1020-1022
発行年:1992年03月
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