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ArticleJ-GLOBAL ID:200902015591705775整理番号:90A0036235

Plasma-etched and sputtered GaAs(100) surfaces investigated by ellipsometry and Raman spectroscopy.

偏光解析およびRaman分光によって研究したプラズマエッチおよびスパッタGaAs(100)表面

著者:ROSSOW U(Rheinisches‐Westfaelische Technische Hochschule, Aachen, DEU)、FIESELER T(Rheinisches‐Westfaelische Technische Hochschule, Aachen, DEU)、GEURTS J(Rheinisches‐Westfaelische Technische Hochschule, Aachen, DEU)・・・
資料名:J Phys Condens Matter 巻:1 号:Suppl B ページ:SB231-SB233
発行年:1989年10月
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