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ArticleJ-GLOBAL ID:200902015594558749整理番号:92A0213962

Structure and microhardness of TiN compositional and alloyed films.

TiN系の組成膜ないし混晶膜の構造と微小硬さ

著者:ANDRIEVSKI R A(Inst. New Chemical Problems, AS U.S.S.R., Moscow Region, SUN)、ANISIMOVA I A(Inst. Physics, AS Kirghizstan, Bishkek, SUN)、ANISIMOV V P(Inst. Physics, AS Kirghizstan, Bishkek, SUN)
資料名:Thin Solid Films 巻:205 号:2 ページ:171-175
発行年:1991年12月01日
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