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ArticleJ-GLOBAL ID:200902015594711768整理番号:88A0530744

Interferometric measurement of substrate heating induced by pulsed laser irradiation.

パルスレーザの放射で加熱された基板の干渉計測

著者:SAENGER K L(IBM Thomas J. Watson Research Center, NY, USA)
資料名:J Appl Phys 巻:63 号:8 Pt1 ページ:2522-2525
発行年:1988年04月15日
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