Art
J-GLOBAL ID：200902015594711768   Reference number：88A0530744

Interferometric measurement of substrate heating induced by pulsed laser irradiation.

パルスレーザの放射で加熱された基板の干渉計測
Author (1)：
SAENGER K L

About SAENGER K L

(IBM Thomas J. Watson Research Center, NY, USA)

About IBM Thomas J. Watson Research Center, NY, USA


Material：
Journal of Applied Physics  (Journal of General Physics and its Application to Other Sciences and to Industry)

About Journal of Applied Physics


Volume： 63  Issue： 8 Pt1  Page： 2522-2525  Publication year： Apr. 15, 1988 
JST Material Number： C0266A  ISSN： 0021-8979  CODEN： JAPIAU  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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laser heating

About laser heating

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Interferometry and interferometers 
(BD07070G)

About Interferometry and interferometers

,  Laser irradiation effects and damages 
(BK16040S)

About Laser irradiation effects and damages

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
パルスレーザ

About パルスレーザ

, 
放射

About 放射

, 
干渉計測

About 干渉計測


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