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ArticleJ-GLOBAL ID:200902015594742078整理番号:83A0189197

On the origin of adsorption stress in thin porous films.

多孔性薄膜における吸着応力の起因

著者:HIRSCH E H(Electronics Research Lab. Dep. Defence, Australia)
資料名:J Phys D 巻:15 号:10 ページ:1991-2002
発行年:1982年10月14日
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