Art
J-GLOBAL ID：200902015595483360   Reference number：85A0413093

Planar quartz-polysiloxane composite insulator.

平面化石英/ポリシロキサン複合絶縁体
Author (3)：
FLITSCH F

About FLITSCH F

(IBM Corp.)

About IBM Corp.

, 
FLITSCH R

About FLITSCH R

(IBM Corp.)

About IBM Corp.

, 
HAVAS J

About HAVAS J

(IBM Corp.)

About IBM Corp.


Material：
IBM Technical Disclosure Bulletin  (IBM Tech Disclosure Bull)

About IBM Technical Disclosure Bulletin


Volume： 27  Issue： 7B  Page： 4267-4268  Publication year： Dec. 1984 
JST Material Number： E0292B  ISSN： 0018-8689  CODEN： IBMTA  Document type： Article
Article type： 解説  Country of issue： United States (USA)  Language： ENGLISH (EN)
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semiconductor integrated circuit

About semiconductor integrated circuit

,...
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JST classification (1)：
JST classification
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Manufacturing technology of solid-state devices 
(NC03030V)

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Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
石英

About 石英

, 
ポリシロキサン

About ポリシロキサン

, 
複合絶縁体

About 複合絶縁体


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