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ArticleJ-GLOBAL ID:200902015598383455整理番号:91A0719853

Interface hardening by implanting F or CL into sacrificial oxide.

犠性酸化物にFまたはClを打込むことによる界面硬化

著者:TSENG H‐H(MOTOROLA INC.)、NGUYEN B‐Y(MOTOROLA INC.)、PFIESTER J(MOTOROLA INC.)
資料名:Motorola Tech Dev 巻:13 ページ:22
発行年:1991年07月
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.