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J-GLOBAL ID:200902015601963875   Reference number:91A0039747

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Volume: 30  Issue: 11  Page: 41-42  Publication year: Nov. 1990 
JST Material Number: E0227B  ISSN: 0013-4945  Document type: Article
Article type: 解説  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices 
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