Art
J-GLOBAL ID：200902015604194678   Reference number：82A0097460

Chemical etching characteristics of (001)InP.

(001)InPの化学エッチング特性
Author (2)：
ADACHI S

About ADACHI S

(Musashino Electrical Communication Lab., Tokyo)

About Musashino Electrical Communication Lab., Tokyo

, 
KAWAGUCHI H

About KAWAGUCHI H

(Musashino Electrical Communication Lab., Tokyo)

About Musashino Electrical Communication Lab., Tokyo


Material：
Journal of the Electrochemical Society  (J Electrochem Soc)

About Journal of the Electrochemical Society


Volume： 128  Issue： 6  Page： 1342-1349  Publication year： Jun. 1981 
JST Material Number： C0285A  ISSN： 1945-7111  CODEN： JESOAN  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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Keywords indexed to the article.
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indium phosphide

About indium phosphide

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
etchant

About etchant

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Techniques for samples 
(BA02070O)

About Techniques for samples

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
InP

About InP

, 
化学

About 化学

, 
エッチング特性

About エッチング特性


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