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ArticleJ-GLOBAL ID:200902015604194678整理番号:82A0097460

Chemical etching characteristics of (001)InP.

(001)InPの化学エッチング特性

著者:ADACHI S(Musashino Electrical Communication Lab., Tokyo)、KAWAGUCHI H(Musashino Electrical Communication Lab., Tokyo)
資料名:J Electrochem Soc 巻:128 号:6 ページ:1342-1349
発行年:1981年06月
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About J-GLOBAL

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