Control of Hydrocarbon Radicals and Amorphous Carbon Film Deposition by Means of RF Whistler Wave Discharge.

MIENO T; SHOJI T; KADOTA K

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J-GLOBAL ID：200902015608363598 Reference number：92A0517685

Control of Hydrocarbon Radicals and Amorphous Carbon Film Deposition by Means of RF Whistler Wave Discharge.

RFホイスラ波放電による炭化水素ラジカルの制御および非晶質炭素膜堆積

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Material：
Volume： 31 Issue： 6A Page： 1879-1884 Publication year： Jun. 1992
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Thin films of other inorganic compounds

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