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J-GLOBAL ID：200902015612575087
Reference number：91A0908501
Figure of Merit for Calibration and Comparison of Linewidth Measurement Instruments.
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Author (2)：
,
Material：
Volume：
1464
Page：
22-34
Publication year：
1991
JST Material Number：
D0943A
ISSN：
0277-786X
CODEN：
PSISDG
Document type：
Proceedings
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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