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ArticleJ-GLOBAL ID:200902015622803614整理番号:86A0265863

ターボ分子ポンプの開発の歴史 小型・軽量化とアルミ化

Trends in the developments and use of turbomolecular pumps.

著者:中島実(はく東)
資料名:Ionics 巻:11 号:9 ページ:33-35
発行年:1985年09月
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