Art
J-GLOBAL ID：200902015623613126   Reference number：89A0435866

Ion assisted deposition of oxynitrides of aluminum and silicon.

アルミニウムとシリコンの窒化酸化物のイオン援助蒸着
Author (4)：
AL-JUMAILY G A

About AL-JUMAILY G A

(Barr Assoc. Inc., MA, USA)

About Barr Assoc. Inc., MA, USA

, 
MOONEY T A

About MOONEY T A

(Barr Assoc. Inc., MA, USA)

About Barr Assoc. Inc., MA, USA

, 
SPURGEON W A

About SPURGEON W A

(Army Materials Technology Lab., MA, USA)

About Army Materials Technology Lab., MA, USA

, 
DAUPLAISE H M

About DAUPLAISE H M

(Army Materials Technology Lab., MA, USA)

About Army Materials Technology Lab., MA, USA


Material：
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films  (Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films)

About Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films


Volume： 7  Issue： 3 Pt.2  Page： 2280-2285  Publication year： May. 1989 
JST Material Number： C0789B  ISSN： 0734-2101  CODEN： JVTAD6  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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evaporated film

About evaporated film

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
IAD

About IAD


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

,  Optical properties of condensed matter in general 
(BM08010A)

About Optical properties of condensed matter in general

Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
アルミニウム

About アルミニウム

, 
シリコン

About シリコン

, 
窒化

About 窒化

, 
酸化物

About 酸化物

, 
イオン

About イオン

, 
援助

About 援助

, 
蒸着

About 蒸着


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