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ArticleJ-GLOBAL ID:200902015627784740整理番号:93A0004738

Siヘテロ超構造技術とそのデバイス応用

Silicon super-heterostructure technology and its application to noble devices.

著者:宮尾正信(日立 中研)、中川清和(日立 中研)
資料名:応用物理 巻:61 号:11 ページ:1104-1115
発行年:1992年11月
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About J-GLOBAL

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