Art
J-GLOBAL ID:200902015632341198   Reference number:82A0266116

Humidity sensitivity of optical structures prepared by r.f.-biased r.f. sputtering.

rfバイアスしたrfスパッタリング法により作製した光学構造膜の湿度敏感性
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Material:
Volume: 85  Issue:Page: 71-75  Publication year: Oct. 30, 1981 
JST Material Number: B0899A  ISSN: 0040-6090  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Oxide thin films  ,  Optical properties of condensed matter in general 

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