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ArticleJ-GLOBAL ID:200902015641367850整理番号:92A0337378

Synthesis and Polymerizations of N-(tert-Butoxy) Maleimide and Characeristic Properties of its Polymer for Application as Chemical Amplification Resists.

N‐(tert‐ブトキシ)マレイミドの合成と重合及びそのポリマの化学的増幅レジスト応用のための特性

著者:AHN K‐D(Korea Inst. Science and Technology, Seoul, KOR)、KOO D‐I(Korea Inst. Science and Technology, Seoul, KOR)
資料名:Polym Mater Sci Eng 巻:66 ページ:249-250
発行年:1992年
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