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J-GLOBAL ID:200902015646046350   Reference number:91A0308218

Ion beam technique for function material development.

機能材料開発のためのイオンビーム技術
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Volume: 1991  Issue:Page: S4.23-S4.26  Publication year: Apr. 1991 
JST Material Number: S0653A  Document type: Proceedings
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Applications of electron beams and ion beams 
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