Art
J-GLOBAL ID：200902015652571157   Reference number：84A0423989

A comparison of MOS processes for VLSI. Part I.

VLSIに対するMOS諸工程の比較 I
Author (2)：
OLDHAM H E

About OLDHAM H E

(GEC, United Kingdom)

About GEC, United Kingdom

, 
PARTRIDGE S L

About PARTRIDGE S L

(GEC, United Kingdom)

About GEC, United Kingdom


Material：
Solid State Technology  (Solid State Technol)

About Solid State Technology


Volume： 27  Issue： 6  Page： 177-183  Publication year： Jun. 1984 
JST Material Number： E0226A  ISSN： 0038-111X  Document type： Article
Article type： 解説  Country of issue： United States (USA)  Language： ENGLISH (EN)
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VLSI

About VLSI

,...
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Thesaurus term/Semi thesaurus term
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SOI

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,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Semiconductor integrated circuit 
(NC03162T)

About Semiconductor integrated circuit

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (2)：
Terms in the title
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VLSI

About VLSI

, 
MOS

About MOS


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