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ArticleJ-GLOBAL ID:200902015652571157整理番号:84A0423989

A comparison of MOS processes for VLSI. Part I.

VLSIに対するMOS諸工程の比較 I

著者:OLDHAM H E(GEC, United Kingdom)、PARTRIDGE S L(GEC, United Kingdom)
資料名:Solid State Technology 巻:27 号:6 ページ:177-183
発行年:1984年06月
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