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ArticleJ-GLOBAL ID:200902015656609043整理番号:91A0622339

A low-energy fast-atom beam source.

低エネルギー高速原子ビーム源

著者:GORBATOV Y B(Inst. Microelectronics Technology and High Purity Materials, USSR Academy of Sciences, Moscow District, SUN)、VYATKIN A F(Inst. Microelectronics Technology and High Purity Materials, USSR Academy of Sciences, Moscow District, SUN)、ZINENKO V I(Inst. Microelectronics Technology and High Purity Materials, USSR Academy of Sciences, Moscow District, SUN)
資料名:Nucl Instrum Method Phys Res Sect B Beam Interact Mater At 巻:55 号:1/4 ページ:328-330
発行年:1991年04月
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About J-GLOBAL

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