Polymer film formation in C2F6-H2 discharges.

D'AGOSTINO R; CRAMAROSSA F; FRACASSI F; DESIMONI E; SABBATINI L; ZAMBONIN P G; CAPORICCIO G

Art

J-GLOBAL ID：200902015670878391 Reference number：87A0141574

Polymer film formation in C₂F₆-H₂ discharges.

C₂F₆-H₂放電での重合膜の形成

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Material：
Volume： 143 Issue： 2 Page： 163-175 Publication year： Oct. 01, 1986
JST Material Number： B0899A ISSN： 0040-6090 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Thin films of organic compounds , 脂肪族,脂環式化合物の重合【’81~’92】

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