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ArticleJ-GLOBAL ID:200902015670878391整理番号:87A0141574

Polymer film formation in C2F6-H2 discharges.

C2F6‐H2放電での重合膜の形成

著者:D’AGOSTINO R(Centro di Studio per la Chimica dei Plasmi, Consiglio Nazionale delle Ricerche, Bari, ITA)、CRAMAROSSA F(Centro di Studio per la Chimica dei Plasmi, Consiglio Nazionale delle Ricerche, Bari, ITA)、FRACASSI F(Centro di Studio per la Chimica dei Plasmi, Consiglio Nazionale delle Ricerche, Bari, ITA)・・・
資料名:Thin Solid Films 巻:143 号:2 ページ:163-175
発行年:1986年10月01日
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