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ArticleJ-GLOBAL ID:200902015674185846整理番号:83A0163921

Amorphous hydrogenated carbon from the plasma deposition of C2H2, C2H4 or CH4.

C2H2,C2H4あるいはCH4のプラズマ蒸着による非晶質水素化炭素

著者:LIN S-H(Univ. Missouri)、FELDMAN B J(Univ. Missouri)
資料名:Philosophical Magazine. B. Physics of Condensed Matter: Statistical Mechanics, Electronic, Optical and Magnetic Properties 巻:47 号:1 ページ:113-116
発行年:1983年01月
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